Waferpedia

Tool family

Advanced Energy ATX-600

Models in this family

  1. The Advanced Energy ATX-600 is a 600-watt water-cooled RF impedance matching network used in plasma processing applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    3155017-000L——Model number as per listingfabsurplus.com[1]
    3155017-002——Model number as per listingfabsurplus.com[2]
    3155021-000B——Related part numberwsemi.com[3]
    3155017-024——Related part numberwsemi.com[3]
    5079C——Related part numberwsemi.com[3]

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]wsemi.comwsemi.com