Waferpedia

Comparison ledger

160 XP IonversusKestrel 750

Varian 160 XP Ion, Varian Kestrel 750, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 160 XP IonVarian Kestrel 750
Specifications
Configuration150mm High Current IMP[1]—
OEMVarian[2]—
Model160 XP Ion[2]—
CategoryIon Implantation[1]Ion Implantation[5]
Tool typeion implanter[1]—
Wafer Size—200 mm (8 inch)[3]
Type—MEV Implanter[4]
Wafer size—8 inch[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]waferpedia.comwaferpedia.com