Comparison ledger
Ultratech LSA100, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | LSA100Ultratech | |
|---|---|---|
| OEM | Ultratech | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | 65 nm | — |
| Introduced | 2004 | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2004 Introduction on Unity Platform | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech LSA100 | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Type | annealing system[1] | — |
| Process | Laser Processing laser spike annealing[1] | — |
| Platform | Unity Platform[1] | — |
| Introduction | mid-2004[1] | — |
| Node association | beyond the 65-nm node[1] | — |
| Asset Number | — | 142841[2] |
| Last Confirm Date | — | October 14, 2025[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →