Comparison ledger
Thermo Fisher 1300 Series Safety, YES R3, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | R3YES |
|---|---|---|
| OEM | Thermo Fisher | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | YES R3 |
| Specifications | ||
| Configuration | Class II[1] | — |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| System type | — | Plasma cleaner / plasma cleaning system[4] |
| Control | — | Sequential microprocessor[4] |
| Program storage | — | Up to 90 separate one- or two-gas programs in memory[4] |
| Power supply | — | 500 Watt[4] |
| Plasma gas inputs | — | Two standard; optional third input[4] |
| Backfill input | — | Standard[4] |
| Electrode sets | — | Two 12-inch square electrode sets standard[4] |
| Sample tray capacity | — | Two 12 x 12 in. sample trays; total capacity 325 sq.in.[4] |
| Sample trays | — | Two 12 x 12 in.; total capacity 325 sq.in.[4] |
| Controller | — | Sequential microprocessor; up to 90 stored one- or two-gas programs[4] |
| Process gas and modes (UC Santa Barbara configuration) | — | Oxygen; downstream and direct plasma cleaning[5] |
| Position in series | — | Smallest of the series; pilot run quantities[4] |
| Equipment type | — | Plasma cleaning system[6] |
| Control system | — | Sequential microprocessor[4] |
| Stored programs | — | Up to 90 separate one- or two-gas programs[4] |
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