Comparison ledger
Tegal 6500, Tegal 6500 U, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6500Tegal | 6500 UTegal |
|---|---|---|
| OEM | Tegal | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 6500 | Tegal 6500 |
| Specifications | ||
| Configuration | 2 Chamber Nitride Etch[1] | 2 Chamber Nitride Etch[2] |
| OS | JDOS[1] | JDOS[2] |
| Missing | pumps, unknown[1] | pumps, unknown[2] |
| Number of chambers | 2[1] | — |
| Etch type | Nitride[1] | — |
| Operating system | JDOS[1] | — |
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