Waferpedia

Comparison ledger

8620 Dual Track Waferversus1000FP

SVG 8620 Dual Track Wafer, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSVGYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySVG 8620 Dual Track WaferYES 1000FP
Specifications
ConfigurationDouble Sided[1]—
ManufacturerSVG[2]—
Model8620[2]Glen/YES 1000FP[4]
Equipment typeDual Track Wafer Scrubber[2]—
Wafer size4 inch[2]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org