Comparison ledger
SUSS MicroTec MA 200 Gen 3 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 200 Gen 3 MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA 200 | Ultratech 1000 Family |
| Cited variants | — | |
| Specifications | ||
| Phase | 3 Phase + N + PE[1] | — |
| Configuration | 25A[1] | — |
| Power | 5.5kVA[1] | — |
| Voltage | 400V~[1] | — |
| Maximum wafer size | up to 8" / 200 mm[4] | — |
| Wafer size (6" configuration) | 6 inch[1] | — |
| Wafer size (8" configuration) | 8 inch[2] | — |
| Operation type | Automatic[4] | — |
| Electrical supply (6" configuration) | 3 Phase + N + PE - 25A - 5.5kVA - 50/60 Hz - 400V~[1] | — |
| Electrical supply (8" compact configuration) | 3 Phase + N + PE - 50/60 Hz[2] | — |
| Hard disk and software (compact) | with HDD and Software[2] | — |
| Complete PC and HDD | Complete PC - HDD[3] | — |
| BSA option | BSA Option included[3] | — |
| DirectAlign option | DirectAlign Option included[3] | — |
| Equipment type | Mask Aligner[1] | — |
| Wafer sizes | 6 inch[1] | — |
| Wafer size capability | up to 8"/200 mm[4] | — |
| Automation | Automatic mask aligner[4] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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