Comparison ledger
Strasbaugh 100R16, Strasbaugh 6 EC CMP Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100R16Strasbaugh | 6 EC CMP WaferStrasbaugh |
|---|---|---|
| OEM | Strasbaugh | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Strasbaugh 100R16 | Strasbaugh 6 EC CMP Wafer |
| Specifications | ||
| type | 1 spindle grinder/polisher[1] | — |
| drive system | DC drive system with 2 motors[1] | — |
| spindle RPM | 1-180 RPM[1] | — |
| eccentric RPM | 1-90 RPM[1] | — |
| controls | digital timer; air down switch; spindle and eccentric speed dials; air regulators[1] | — |
| capacity | 16 inches[1] | — |
| spindle size | 1-8 TPI[1] | — |
| overall dimensions | 28 inches x 36 inches x 48 inches[1] | — |
| weight | 500 lbs[1] | — |
| origin | made in the USA[1] | — |
| Make | — | Strasbaugh[2] |
| Model | — | 6 EC CMP[2] |
| System type | — | CMP Wafer Polisher[2] |
| System description | — | Economical tool for CMP research, failure analysis, and low-volume production[3] |
| Operation | — | Semi-automatic[3] |
| GUI | — | Color, touch-screen GUI[3] |
| Table and spindle motors | — | Closed-loop table and spindle RPM motors[3] |
| Pad conditioning | — | Programmable pad conditioning[3] |
| Programmable control zones | — | 20 zones[3] |
| Programmable control parameters | — | Dwell time, down force, and RPM[3] |
| Pad conditioning media | — | Diamond plated disk or nylon brush[3] |
| Option | — | ViPRR carriers[3] |
| Asset # | — | 73620[2] |
| Operating mode | — | semi-automatic[3] |
| User interface | — | color, touch-screen GUI[3] |
| Process control zones | — | 20 zones of programmable control[3] |
| Facility utility requirements | — | DI Water: 30 psi minimum, 1.5 GPM flow rate; Vacuum: 25" HG; Air: 100 psi, 5 SCFM; Electrical: 208 or 230 VAC, 3 phase, 60 Hz, 20 AMPS with conditioner, 30 AMPS; Exhaust: approx. 100 CFM[3] |
| Pad conditioning tools | — | diamond plated disk or nylon brush[3] |
| Options | — | ViPRR carriers[3] |