Waferpedia

Comparison ledger

108Tversus4300 S SRD

PR Hoffman 108T, Semitool 4300 S SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
108TPR Hoffman
4300 S SRDSemitool
OEMPR HoffmanSemitool
CategoryCMPCMP
Wafer sizeup to 12 in wafers200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPR Hoffman 108TSemitool 4300 S SRD
Specifications
carrier type listing108T 9B - S/F / Lapmaster LSP-9 / etc.[1]—
machine classfor double-sided planetary lapping & polishing machines[1]—
wafer sizes stated on insert-carrier page3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[1]—
maximum carrier diameter stated on insert-carrier pageup to 33 in diameter[1]—
maximum carrier diameter stated on lapping-carrier pageup to 48 in diameter[2]—
Configuration—Single stack[3]
Voltage—110V ready system[3]
Wafer size—<25 particles @ .25um / 200mm wafer[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing