Comparison ledger
Oxford Instruments 100 ICP Fluorine, SCREEN WS 820 L, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | WS 820 LSCREEN |
|---|---|---|
| OEM | Oxford Instruments | SCREEN |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1996 Vintage · 1997 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | SCREEN WS 820 L |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | — |
| Configuration | — | SiN Wet Etching[2] |
| Chemical | — | H3PO4 , IPA , HF[2] |
| PLC (Loader / Unloader) | — | Mitsubishi A3A CPU P21[2] |
| Olifra | — | wafer flatzone[2] |
| Main PC | — | Mitsubishi/LM (hard disket OK)[2] |
| Signal Tower | — | 3 color (GYR) Patlite lamp type[2] |
| Phase | — | 3 Phase, 208V, 170a, 100V[2] |
| Left/ Right Stepping Motor (Oriental | — | VEXTA A 6259)[2] |
| Up/Down Stepping Motor (Oriental | — | VEXTA PK 596 H[2] |
| Wafer Size | — | 8 inch[2] |
| Process | — | SiN wet etching, nitride strip[2] |
| Chemicals | — | H3PO4, IPA, HF[2] |
| Transfer Type | — | Rear type transfer flow[2] |
| IPA Dryer Fire Extinguisher | — | Yes[2] |
| PLC | — | Mitsubishi A3A CPU P21[2] |
| Wafer Flatzone | — | Olifra[2] |
| Front Carrier Detector Sensor | — | Yes[2] |
| Power | — | 3 Phase, 208V, 170A, 100V[2] |
| Carrier Loading | — | 2 carrier loading (stocker 8 carrier loading)[2] |
| Stepping Motors (Left/Right) | — | Oriental VEXTA A 6259[2] |
| Stepping Motors (Up/Down) | — | Oriental VEXTA PK 596 H[2] |
| Measuring Units | — | H3PO4 measuring tank, DIW measuring tank, H3PO4 DIW spiking pump, HF measuring tank[2] |
| Resistivity Meter | — | DKK AQ 10 (Final Rinse)[2] |
| Circulation Heater | — | In-Line Heater[2] |
| Circulation Pump | — | FS 30 HT 2[2] |
| Circulation Filter | — | High Temp Filter[2] |
| Aspirator Drain | — | Yes[2] |
| Pump | — | FS 30 HT 2[2] |
| Filter | — | High Temp Filter[2] |
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