Waferpedia

Comparison ledger

March AP 600versus1000FP

Nordson March AP 600, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMNordsonYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNordson March AP 600YES 1000FP
Specifications
ManufacturerNordson[1]—
ModelAP 600[2]Glen/YES 1000FP[4]
TypePlasma Cleaner[2]—
CategoryWet Processing / Clean[1]—
Enclosure dimensions (W x D x H)569 x 869 x 704 mm (22 x 34 x 28 in.)[3]—
Net weight221 kg (487 lbs)[3]—
Chamber maximum volume50.4 liters (3076 in³)[3]—
Number of electrode positions7[3]—
RF power standard wattage600 W[3]—
Frequency13.56 MHz[3]—
Control systemEPC control with touchscreen interface[3]—
Remote interfacePlasmaLINK, ProcessLINK[3]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]nc-p-001.sitecorecontenthub.cloudnc-p-001.sitecorecontenthub.cloud
  4. [4]web.archive.orgweb.archive.org