Comparison ledger
Nikon 1505 G 6 E, Tokyo Electron Act 8 I-Line Track, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | Act 8 I-Line TrackTokyo Electron |
|---|---|---|
| OEM | Nikon | Tokyo Electron |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | 1999 |
| Production run | 1988– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | i-line |
| Family | Nikon 1505 | Tokyo Electron Act |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 5" reticle[6] | 1C/3D[1] |
| Resolution | 650 nm[7] | — |
| Numerical Aperture | 0.54[7] | — |
| Reduction | 5x[7] | — |
| Exposure Field | 15 x 15 mm[7] | — |
| Alignment Accuracy | 130 nm[7] | — |
| Wafer Size | 4 inch[6] | 8 inch[1] |
| Light Source | g-line[8] | — |
| Introduction Year | 1988[7] | — |
| NA (Numerical Aperture) | 0.54[7] | — |
| Make | Nikon[6] | Tel[1] |
| Model | 1505 G 6 E[6] | Act 8[1] |
| Category | Stepper[6] | — |
| Wafer Sizes | 4 inch[6] | — |
| Exposure type | g-line[7] | — |
| NA | 0.54[7] | — |
| Exposure field | 9.3 x 18.8 mm[7] | — |
| Vintage | — | 1999[1] |
| Generation | — | I-Line[1] |
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