Comparison ledger
MKS FI 20160 1 Microwave, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | MKS | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | MKS FI 20160 | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Phase | SmartPower series - 3.0 kW - Liquid-cooled - 200–208 VAC, 3-phase - Remote / DeviceNet control[1] | — |
| Voltage | 208 V[1] | — |
| Configuration | 20 A[1] | — |
| Power | 3.0 kW[1] | — |
| Cooling | Liquid-cooled[1] | — |
| Current | 20 A[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Control | Remote / DeviceNet[1] | — |
| Asset Number | — | 142841[2] |
| Last Confirm Date | — | October 14, 2025[3] |
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