Waferpedia

Comparison ledger

1 DP 41versus6 CW Wafer

Logitech 1 DP 41, Strasbaugh 6 CW Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
6 CW WaferStrasbaugh
OEMLogitechStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41Strasbaugh 6 CW Wafer
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]—
Voltage480 V[1]—
MakeLogitech[1]—
Model1 DP 41[1]6 CW[2]
Frequency50/60 Hz[1]—
Current12 amps[1]—
Manufacturer—Strasbaugh[2]
Equipment type—Wafer polisher[2]
Category—CMP[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com