Comparison ledger
Lapmaster 15 Lapper, Rorze RR 700 L 150 Z 30, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 15 LapperLapmaster | RR 700 L 150 Z 30Rorze |
|---|---|---|
| OEM | Lapmaster | Rorze |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 15 | Rorze RR 700 L 150 Z 30 |
| Cited variants | — |
|
| Specifications | ||
| Number Of Conditioning Rings | Up to 3[2] | — |
| Ring ID | Up to 5.5″[2] | — |
| Plate Diameter – Outside | 15″[2] | — |
| Plate Diameter – Inside | 3 1/2″[2] | — |
| Standard RPM | 60[2] | — |
| Drive Motor | 1/2 HP[2] | — |
| Electrics | 110V / 1Ph / 60Hz[2] | — |
| Dimensions – Approximate | 26″(L-R) x 21″(F-B) x 22″(H)[2] | — |
| Configuration | Equipped with:[2] | Single Arm, compatible with AMAT Mirra Mesa CMP[3] |
| Equipped with: 15″ Cast Iron Plate | Included[2] | — |
| Equipped with: (3) Yoke/Roller Bearing Assemblies | Included[2] | — |
| Equipped with: (3) Conditioning Rings | Included[2] | — |
| Equipped with: (3) Hold Downs | Included[2] | — |
| Equipped with: 30 Minute Timer | Included[2] | — |
| Wafer size | — | 6 inch[3] |
| Wafer size (alternate variant) | — | 200mm[1] |
| Arm configuration | — | Single arm[3] |
| Compatible systems | — | AMAT Mirra Mesa CMP[3] |
| Application type | — | SMIF robot[1] |
| Wafer size (base model) | — | 6 inch[3] |
| Robot type | — | Dry robot[4] |
| Manufacturer | — | Rorze[3] |
| Model | — | RR 700 L 150 Z 30[3] |
| Category | — | CMP[5] |
| Wafer handling size | — | 200 mm[5] |
| Compatibility | — | AMAT Mirra Mesa CMP[3] |