Waferpedia

Comparison ledger

12 Lapperversus6 DE DC 6

Lapmaster 12 Lapper, Strasbaugh 6 DE DC 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
6 DE DC 6Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Strasbaugh 6 DE DC 6
Cited variants—
Specifications
Outside plate diameter12 inches[2]—
Lapping Speed Range0 to 60 rpm[3]—
Wafer Size Compatibility4 inches or smaller[2]—
Input Voltage110 V[2]—
Frequency60 Hz[2]—
Phase1[2]—
Number of Rings3[2]—
Number of Weights3[2]—
Includes Slurry SystemYes[2]—
Includes TimerYes[2]—
Configuration—Six Spindle[1]
Make—Strasbaugh[4]
Model—6 DE DC 6[5]
Type—Polisher[4]
Number of spindles—6[1]
Capacity—12 inch[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]jmind.comjmind.com
  3. [3]etd.ohiolink.eduetd.ohiolink.edu
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing