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Comparison ledger

12 Benchtop Lapping PolishingversusEP1

Lapmaster 12 Benchtop Lapping Polishing, Logitech EP1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EP1Logitech
OEMLapmasterLogitech
CategoryCMPCMP
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 12 Benchtop Lapping PolishingLogitech EP1
Specifications
MakeLapmaster[1]—
Model12[1]—
CategoryCMP[2]—
Type/ApplicationSingle sided[3]—
Plate diameter12 in[3]—
No. of conditioning rings3[4]—
ConfigurationRing lapper[4]—
BaseRigid, lightweight, cast aluminum base[4]—
Standard RPM60 RPM[4]—
RPM range with variable speed drive0-60[4]—
Drive motor - lapper0.5 HP[4]—
Drive motor - polisher0.75 HP[4]—
Length25 in[4]—
Width18 in[4]—
Height24 in[4]—
Estimated shipping weight240 lbs[4]—
Approximate weight135 lbs / 61 kg[5]—
Approximate dimensions24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[5]—
Electrical systemVarious voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[5]—
Motor1/3 hp / 0.25 kW motor with gear reducer[5]—
Abrasive feed systemDesigned for water or oil based lapping slurries[5]—
Automatic cycle timerAutomatic digital cycle timer[5]—
Ring configurationRing lapper[4]—
Ring ID4.25 inches[4]—
Product family—EP Polishing Pads and Cloths[6]
Application type—Chemical Mechanical Polishing (CMP)[6]
Suitable applications—oxide, nitride and copper[6]
Type—Chemical Mechanical Polishing (CMP) cloths and pads[6]
Suitable materials—Oxide, nitride and copper[6]
Product type—Chemical Mechanical Polishing (CMP) polishing cloths and pads[6]
Applications—oxide, nitride, and copper[6]
Associated wafer process capacity—up to 100mm/4"[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lapmaster-wolters.comlapmaster-wolters.com
  4. [4]catalog.lapmaster.comcatalog.lapmaster.com
  5. [5]lapmaster-wolters.comlapmaster-wolters.com
  6. [6]web.archive.orgweb.archive.org
  7. [7]web.archive.orgweb.archive.org