Comparison ledger
Lam Research SEZ SP 203, Lam Research SEZ SP 203 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ SP 203Lam Research | SEZ SP 203 SpinLam Research |
|---|---|---|
| OEM | Lam Research | Lam Research |
| Category | Wet Processing / Clean | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1998 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ SP 203 | Lam Research SEZ SP 203 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 200-208 V[2] | 50/60 Hz[4] |
| Phase | 3 Phase[2] | ENI VL-400 Phase Shift Controller[5] |
| Pinless chuck | 6 Inch[2] | — |
| Software | Major Version 117[2] | — |
| Cabinet 1 | Main tank and Buffer tank[2] | — |
| Cabinet 2 | Main tank and Buffer tank[2] | — |
| Cabinet 3 | Main tank[2] | — |
| Modifications | FFU controller; 1 cabinet drain box repaired[2] | — |
| Manufacturer | Lam Research[3] | — |
| Category | Wet Processing / Clean[3] | Etch[1] |
| Wafer size | 6 inch[2] | 150mm[6] |
| Power | 200-208 V[2] | 400V, 50 Hz, 3-Phase[5] |
| Frequency | 50/60 Hz[2] | — |
| Wafer handling | 6 Inch Bernoulli Handling[2] | — |
| Chuck | Pinless chuck: 6 Inch[2] | — |
| Vacuum exhaust | Exhaust Up[3] | — |
| Chemistry cabinets | 3 Chemistry Cabinets[3] | — |
| Software major version | 117[2] | — |
| Software minor version | 2015.08.21[2] | — |
| GEM version | GEM 5.8[2] | — |
| Known problems | Keyboard switching; Voltage fluctuations[2] | — |
| Voltage | — | 400 VAC[4] |
| Max. Current | — | 32 A[4] |
| Breaking Capacity | — | 10.000 AIC[4] |
| Roughing Pump Code | — | A532-80-905[5] |
| OEM | — | Lam Research[1] |
| Model | — | SEZ SP 203 Spin[4] |
| Tool type | — | Spin etcher[1] |
| Vintage | — | 1999[6] |
| Process pump status | — | Process pump in one chemical cabinet (sub tool) has malfunction[4] |
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