Comparison ledger
KLA SLF 17, KLA Tera Stay SLF 27 Reticle, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SLF 17KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA SLF | KLA SLF |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | No HDD[1] | 1 Reticle loader[2] |
| Vintage year | 2006[1] | — |
| Equipment type | — | Reticle inspection system[3] |
| Wafer handling | — | 1 reticle loader[3] |
| Telescope option | — | 186nm pixel, 3.2X[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →