Comparison ledger
KLA 8100 Electronic Source, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 8100 | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Base pressure post bake | 3.20 E-10 Torr[1] | — |
| Filament current | 2330 mA[1] | — |
| Temperature at current | 1800 Kelvin[1] | — |
| Extraction voltage | 3000 V[1] | — |
| Extraction current | 105 uA[1] | — |
| Configuration | Refurbished[1] | — |
| Emitter radius | 0.36 µm[1] | — |
| Distance tip protrudes from the suppressor | 250 um[1] | — |
| Emitter chamber base pressure | <2*10-9 mbar[1] | — |
| Maximum emitter operating pressure | <5*10-9 mbar[1] | — |
| Asset Number | — | 142841[2] |
| Last Confirm Date | — | October 14, 2025[3] |
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