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Comparison ledger

.204 PSL WaferversusScientific FEI Quanta 450 FEG

KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Quanta 450 FEG, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferThermo Fisher Scientific FEI Quanta
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Voltage—230 V[3]
Equipment type—Scanning electron microscope (SEM)[4]
Make—Thermo Fisher Scientific / FEI[4]
Model—Quanta 450 FEG[4]
Electrical—50/60 Hz - 230 V[3]
Included accessory—with Caron 2050-4[3]
Vintage—2013[3]
Asset #—155815[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing