Waferpedia

Comparison ledger

.204 PSL WaferversusXceed Dual 3D AOI

KLA .204 PSL Wafer, Parmi Xceed Dual 3D AOI, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAParmi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferParmi Xceed Dual 3D AOI
Specifications
ConfigurationNIST Traceable[1]Dual Lane[4]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
System Type—3D AOI (Automated Optical Inspection)[3]
Trade Category—AOI / Automated Optical Inspection[4]
Encyclopedia Category—Metrology & Inspection[5]
Vintage (one inventory listing)—2021[3]
Model Year (another inventory listing)—2022[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]smtnet.comsmtnet.com
  5. [5]waferpedia.comwaferpedia.com