Comparison ledger
KLA .204 PSL Wafer, KLA Candela 8520 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer Thickness 350μm ~ 1100μm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Candela 8520 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Voltage | — | 208 VAC[3] |
| Largest Load | — | 8 A[3] |
| Phase | — | 1 Phase[4] |
| Wafer size | — | Wafer Thickness 350μm ~ 1100μm[4] |
| CDA Pressure | — | 100 psi / 689 KPa (± 10% range)[4] |
| Flow | — | 2 SCFM / 80 L/min (± 10% range).[4] |
| AMC | — | maximum concentration of Volatile Organic Compounds (VOC) must be less than 150 ng/l.[4] |
| Moisture Content | — | less than 20 PPM at 1.0 atm, corresponding to a dewpoint of -30° Celsius (-22°F).[4] |
| Vacuum Pressure | — | -680 mm Hg / -90 KPa (± 10% range).[4] |
| OEM | — | KLA[3] |
| Model | — | Candela 8520 Wafer[3] |
| Equipment type | — | Wafer inspection system[3] |
| Wafer thickness | — | 350μm ~ 1100μm[4] |
| Power | — | 230 V[4] |
| Electrical phase | — | 1 Phase[4] |
| Electrical wiring | — | 3 Wire[4] |
| Current | — | 20 amps[4] |
| Frequency | — | 50/60 Hz[4] |
| Wafer carrier | — | 2 FUP 6 and 8[4] |
| Wafer mapping sensor | — | Micro Optical Sensor[4] |
| Interface | — | SECS-GEM[4] |
| CDA flow | — | 2 SCFM / 80 L/min (± 10% range)[4] |
| Vacuum flow | — | 0.64 SCFM / 18 L/min (± 10% range)[4] |
| Laser 1 | — | 405 nm wavelength, 60 mW power, Class IIIb per CDRH 21CFR 1040[4] |
| Laser 2 | — | 355 nm wavelength, 20 mW power, Class IIIb per CDRH 21CFR 1040[4] |
| Category | — | Wafer Inspection System[3] |
| Electrical | — | 1 Phase, 3 Wire, 230 V, 20 amps, 50/60 Hz[4] |
| Laser wavelengths | — | 405 nm and 355 nm[4] |
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