Comparison ledger
KLA 1007, SUSS MicroTec PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | PM5SUSS MicroTec |
|---|---|---|
| OEM | KLA | SUSS MicroTec |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | SUSS MicroTec PM5 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| system type | — | analytical probe system[3] |
| wafer/substrate diameter | — | up to 150 mm (6″)[3] |
| measurement modes | — | DC and HF measurements[3] |
| failure analysis use | — | suitable as a failure analysis tool[3] |
| probe heads | — | up to 12 SUSS probe heads at one time[3] |
| manipulator probe function | — | nanowires may be picked and placed onto a device or substrate[3] |
| Measurement types | — | DC and HF[3] |
| Max probe heads | — | up to 12 SUSS probe heads[3] |
| Manipulator probe | — | for nanowire pick-and-place[3] |
| Wafer/substrate diameter | — | up to 150 mm (6 in)[3] |
| Failure analysis | — | suitable as a failure analysis tool[3] |
| Contact points | — | up to 4 contact points can be operated independently at the same time[4] |
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