Comparison ledger
KLA 1.112 PSL Wafer, KLA 2139 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 2139 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 30 A[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage | — | 208 VAC[3] |
| Phase | — | 3 Phase[3] |
| Full load | — | 30A[4] |
| Power | — | 60[5] |
| Wafer inspector software | — | Rev. V5.4.010[6] |
| Full Load Current | — | 30 A[3] |
| Frequency | — | 50/60 Hz[3] |
| Vintage | — | 1996[3] |
| Wafer sizes | — | 6 inch, 8 inch[3] |
| Current (full load) | — | 30 A[3] |
| Software | — | WIN NT[7] |
| OEM | — | KLA[8] |
| Model | — | 2139[8] |
| Type | — | Brightfield Inspection[8] |
| Wafer Sizes | — | 6, 8 inch[3] |
| Electrical | — | 208 VAC, 3 Phase, 30 A, 50/60 Hz[3] |
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