Comparison ledger
Hitachi S 7800 DR-SEM, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 7800 DR-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | KLA .498 PSL Wafer |
| Specifications | ||
| Resolution (standard) | 5 nm @ 1 kV[1] | — |
| High-Resolution Mode | 1 nm (Single Spot X/Y Mode)[1] | — |
| Low Magnification Resolution | 5 nm (W/Z Mode)[1] | — |
| Measurement Precision | Static 3 Sigma ±0.010 µm[1] | — |
| Positioning Accuracy (X/Y) | ±15 µm[1] | — |
| Rotation Precision | ±60 µm[1] | — |
| Pre-Alignment Accuracy (X/Y) | ±15 µm[1] | — |
| Stage Travel X | 0–200 mm[1] | — |
| Stage Travel Y | 0–200 mm[1] | — |
| Stage Travel Z | 4–12 mm[1] | — |
| Rotation (R) | 0–360°[1] | — |
| Tilt (T) | 0–60°[1] | — |
| Throughput | 5 wafers/hour[1] | — |
| Vacuum System | Vacuum pumps not included[1] | — |
| Additional Hardware | Chiller, Transformer[1] | — |
| Software | AutoLive Software, Automatic Beam Current Control, Automatic Sample Control, Automatic Defect Review, Automatic Navigation[1] | — |
| Configuration | — | NIST Traceable[2] |
| NIST traceability | — | Yes[2] |
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