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S 5000versus.204 PSL Wafer

Hitachi S 5000, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
S 5000Hitachi
.204 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 5000KLA .204 PSL Wafer
Specifications
Configuration—NIST Traceable[1]
Wafer Size—8 inch[1]
Traceability—NIST[2]
Compatible Tools—Surfscan 6xy0, Sp1[1]
NIST Traceable—Yes[1]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com