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LS 9300 Particle Measurementversus1.112 PSL Wafer

Hitachi LS 9300 Particle Measurement, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
LS 9300 Particle MeasurementHitachi
1.112 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi LS 9300 Particle MeasurementKLA 1.112 PSL Wafer
Specifications
Wafer Size12 inch[1]8 inch[2]
Configuration—NIST Traceable[2]
NIST Traceable—True[2]
Compatible Tools—Surfscan 6xy0 and Sp1[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com