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IS 3200 SE Darkfieldversus1.112 PSL Wafer

Hitachi IS 3200 SE Darkfield, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
IS 3200 SE DarkfieldHitachi
1.112 PSL WaferKLA
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi IS 3200 SE DarkfieldKLA 1.112 PSL Wafer
Specifications
TypeDarkfield Inspection[1]—
Vintage2010[1]—
Configuration—NIST Traceable[2]
Wafer Size—8 inch[2]
NIST Traceable—True[2]
Compatible Tools—Surfscan 6xy0 and Sp1[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com