Waferpedia

Comparison ledger

1305 BSG 3versusSCP 9400 Batch Wafer Processing

Hitachi 1305 BSG 3, Santa Clara Plastics SCP 9400 Batch Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiSanta Clara Plastics
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Santa Clara Plastics SCP
Specifications
Configuration—RCA Clean[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing