Waferpedia

Comparison ledger

IQA 0048 Maskversus150 e Mask

EV Group IQA 0048 Mask, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
OEMEV GroupSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group IQA 0048 MaskSUSS MicroTec 150 e Mask
Specifications
OEMEVG[1]—
ModelIQA 0048[1]—
Equipment typeMask Aligner[1]—
Vintage2012[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing