Comparison ledger
EV Group 6200 Infinity Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6200 Infinity MaskEV Group | 1000 FamilyUltratech |
|---|---|---|
| OEM | EV Group | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 6200 Infinity Mask | Ultratech 1000 Family |
| Specifications | ||
| Manufacturer | EV Group[1] | — |
| Model | 6200 Infinity Mask[1] | — |
| Category | Lithography[1] | — |
| Tool type | Mask aligner[2] | Photolithography step-and-repeat 1X stepper[4] |
| Inventory designation | EVG 6200 Infinity Mask Aligner[3] | — |
| Vintage | 2011[2] | — |
| Model designation | EVG 6200 Infinity[2] | — |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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