Comparison ledger
Disco DFL 7361, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DFL 7361Disco | 15Lapmaster |
|---|---|---|
| OEM | Disco | Lapmaster |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | Integrated Wafer Cleaning System with Atomizing Nozzle | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DFL | Lapmaster 15 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Type FX Laser Head[1] | — |
| Wafer size | Integrated Wafer Cleaning System with Atomizing Nozzle[1] | — |
| Max workpiece size | ø300 mm[2] | — |
| Processing mode | Fully automatic[2] | — |
| X-axis feed speed range | 0.1 - 1,000 mm/s[2] | — |
| Y-axis positioning accuracy | 0.003 mm within 310 mm[2] | — |
| Dimensions (W x D x H) | 1,210 x 3,270 x 1,906 mm[2] | — |
| Weight | approx 2,570 kg[2] | — |
| Supported wafer size | 2" to 12"[1] | — |
| Laser head | Type FX[1] | — |
| Optics system | BSS-6[1] | — |
| Wafer cleaning system | Integrated with Atomizing Nozzle[1] | — |
| OEM | Disco[1] | — |
| Model | DFL 7361[1] | — |
| Category | Laser Saw[1] | — |
| Maximum workpiece size | ø300 mm[2] | — |
| Processing method | Fully automatic[2] | — |
| Dimensions (WxDxH) | 1,210 x 3,270 x 1,906 mm[2] | — |
| Chuck table | Chuck Table moving in X- and Y-direction; 12" and 8" Porous Chuck Table & Spinner Table[1] | — |
| User interface | Graphical User Interface with Touch Screen[1] | — |
| Vision system | High Resolution Image Processing System with Auto Focus[1] | — |
| Frame handling | Fully Automatic Frame Handling System[1] | — |
| Coating system | Independent Hogomax spin coating system[1] | — |
| Loading/unloading | Cassette Loading / Unloading[1] | — |
| Duct unit | Duct Unit (Internal Type)[1] | — |
| Power conditioning | Overseas Transformer Unit; Uninterruptible Power Supply[1] | — |
| Documentation | Operation & Troubleshooting Manual (English); Installation and 3-days Operation Training[1] | — |
| Ablation processing support | Supports ablation processing; corresponding to 300mm workpiece[2] | — |
| Laser Head Type | Type FX[1] | — |
| Chuck Table Movement | X and Y direction[1] | — |
| Image Processing | High Resolution Image Processing System with Auto Focus[1] | — |
| Spin Coating System | Independent Hogomax spin coating system[1] | — |
| Chuck Table Sizes | 12" and 8" Porous Chuck Table & Spinner Table[1] | — |
| Cassette Handling | Cassette Loading / Unloading[1] | — |
| Duct Unit | Internal Type[1] | — |
| Transformer | Overseas Transformer Unit[1] | — |
| Power Supply | Uninterruptible Power Supply[1] | — |
| X-Axis Feed Speed | 0.1 - 1,000 mm/s[2] | — |
| Y-Axis Positioning Accuracy | 0.003 mm or less per 310 mm[2] | — |
| Input Power | — | 110 Vac[3] |
| Plate Diameter | — | 15 inches (381 mm)[4] |
| Number of Conditioning Rings | — | 3[4] |
| Ring ID | — | 5.5 inches (140 mm)[4] |
| Standard RPM | — | 60[4] |
| RPM Range (Variable Speed Drive) | — | 0-60[4] |
| Drive Motor - Lapper | — | 0.5 HP (0.37 kW)[4] |
| Drive Motor - Polisher | — | 0.75 HP (0.56 kW)[4] |
| Length | — | 25 inches (635 mm)[4] |
| Width | — | 20 inches (508 mm)[4] |
| Height | — | 24 inches (610 mm)[4] |
| Estimated Shipping Weight | — | 285 lbs (129.3 kg)[4] |
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