Comparison ledger
Disco DCS 1460 Wafer Cleaner Spin, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | |
|---|---|---|
| OEM | Disco | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DCS | Thermo Fisher 1300 |
| Specifications | ||
| Configuration | Table upgrade for VCSEL cleaning[1] | Class II[3] |
| Maximum workpiece size | Φ300 mm[2] | — |
| Application frame | 2-12[2] | — |
| Table RPM range | 100 to 3,000 min⁻¹[2] | — |
| Setting time for cleaning/drying | 0 to 999 sec[2] | — |
| Cleaning nozzle speed | 1 to 37.5 °/sec[2] | — |
| Cleaning range | Φ450 mm (up to 310 x 310 mm)[2] | — |
| Cleaning pressure range | 2.3 to 11.8 MPa[2] | — |
| Equipment dimensions (W×D×H) | 500 × 650 × 1,220 mm[2] | — |
| Equipment weight (Dry mass) | Approx. 144 kg[2] | — |
| Max. workpiece size | Φ300 mm[2] | — |
| Table RPM | 100 to 3,000 min^-1[2] | — |
| Cleaning nozzles | Standard high pressure cleaning nozzle; optional atomizing cleaning nozzle; dual nozzle configuration possible[2] | — |
| Operator interface | 4 inch LCD touch panel[2] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[4] |
| Airflow compensation | — | SmartFlow airflow compensation system[4] |
| Motors | — | Dual DC motors[4] |
| Front window design | — | SmartClean front window design[4] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4] |
| UV light | — | Programmable UV light[4] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[4] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[4] |
| Front opening choices | — | 8-inch or 10-inch front opening[4] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[5] |
| Certification | — | NSF/ANSI 49, UL, CE[5] |
| Service valves | — | Up to 6 total, 3 on each side wall[5] |
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