Waferpedia

Comparison ledger

3220versusMWS-SiC12F

Disco 3220, Takatori MWS-SiC12F, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
MWS-SiC12FTakatori
OEMDiscoTakatori
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Takatori MWS-SiC12F
Cited variants—
Specifications
equipment typedicing saw[2]—
Workplace sizeø150 mm[3]—
Spindle layoutSingle[3]—
Spindle output1.5 kW at 30,000 min-1[3]—
Spindle max revolution speed40,000 min-1[3]—
X-axis feed speed range0.1 – 500 mm/s[3]—
Y-axis index step0.0001 mm[3]—
Z-axis repeating accuracy0.001 mm[3]—
Z-axis max blade sizeø58 mm[3]—
Product line—MWS (Multi Wire Saw)[1]
Machine type—multi wire saw[1]
Capable materials—SiC, GaN, LT, LN, ALN, SiN, Ga2O3, Sapphire, Crystal, GaAs, GaP, InP, Neodymium magnet, Ceramics, Resin, Metal, Platinum, Silver, Gold and other hard brittle material[1]
Variable processing conditions—thin wire, high wire tension, fast wire running, extra-long time slicing process[1]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]takatori-g.co.jptakatori-g.co.jp
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com