Waferpedia

Comparison ledger

321versusMWS 610 SD

Disco 321, Takatori MWS 610 SD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
MWS 610 SDTakatori
OEMDiscoTakatori
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Takatori MWS 610
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Operating Hours—35076[4]
Configuration—Slurry supply tank with pump and agitator: 24 gal[4]
High rocking angle—± 3°[4]
Slurry supply tank capacity—24 gallons[4]
Rocking angle—±3°[4]
Vintage year—2017[4]
Slurry temperature controller—Present[4]
Slurry flow meter control system—Present[4]
Spindle axis temperature controller—Present[4]
Disposable reel adapter—Present[4]
Load cell electronic control—Present[4]
Electric control cabinet—Present[6]
Power transformer—Present[6]
Rocking bearing system—Present[6]
Ball screw system for work table—Present[6]
Vintage—2017[4]
Machine type—Wire saw[4]
Slurry supply tank—24 gal with pump and agitator[4]
HDD—Included, completely wiped, without software for operation[4]

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Sources (9)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing