Comparison ledger
Disco 321, Meyer Burger DS 271, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | DS 271Meyer Burger |
|---|---|---|
| OEM | Disco | Meyer Burger |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2010 Stated vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Meyer Burger DS 271 |
| Cited variants | — |
|
| Specifications | ||
| OEM | Disco[2] | — |
| Model | 321[2] | — |
| Equipment type | Wafer Dicing Saw[2] | — |
| Facility context | Cleanroom Instrumentation[2] | — |
| Application area | Nano and Micro Fabrication[2] | — |
| Location | FNT 4.106[2] | — |
| Wafer Size | Up to 6 inches[3] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[4] | — |
| Spindle Power (alternate) | 1500 Watt spindle[3] | — |
| Non-Contact Setup | Non Contact Setup[4] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[4] | — |
| Broken Blade Detection | Broken Blade Detection[4] | — |
| Light Tower | Includes Light Tower[4] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[3] | — |
| Wafer size capability | Up to 6" wafers[4] | — |
| Chuck | 6-inch porous film frame chuck[3] | — |
| Spindle power | 1500-watt spindle[3] | — |
| Footprint | Small footprint[3] | — |
| Setup | Non-contact setup[4] | — |
| Blade break detection | Broken blade detection[4] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[4] | — |
| Configuration | — | With HDD & Software[5] |
| Diameter | — | 350 mm[5] |
| Length | — | 1061 mm[5] |
| Weight | — | 175 kg[5] |
| Number | — | 2[5] |
| Required power | — | 2 x 75 kW[5] |
| Bearing application | — | special roller bearings, water-cooled[5] |
| Horizontal distance between axes | — | 660 mm[5] |
| Wire web working height | — | 1515 mm[5] |
| Wire web width | — | 1030 mm[5] |
| Loading length | — | 1020 mm[6] |
| Max workpiece dimensions | — | 220 x 220 mm[6] |
| Workpiece holders | — | 4 x 255 mm, 3 x 340 mm, 2 x 510 mm, 1 x 1020 mm[6] |
| Wire diameter | — | 100–160 micron[6] |
| Wire speed | — | 15 m/sec[6] |
| Wire guide rolls diameter | — | 350 mm[6] |
| Diamond wire upgrade | — | Water based upgrade installed[7] |
| Vintage | — | 2010/2011[6] |
| Wire guide roller diameter | — | 350 mm[5] |
| Wire guide roller length | — | 1061 mm[5] |
| Wire guide roller weight | — | 175 kg[5] |
| Wire guide roller count | — | 2[5] |
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