Comparison ledger
CyberOptics LSM 300, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | LSM 300CyberOptics | |
|---|---|---|
| OEM | CyberOptics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1991–1997 | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CyberOptics LSM 300 | KLA 0035235-003 MMD Head |
| Specifications | ||
| Manufacturer | CyberOptics[1] | — |
| Model | LSM 300[1] | 0035235-003[3] |
| Type | Inspection System[1] | — |
| Inspection mode | Off-line[2] | — |
| Measurement approach | Non-contact laser based system[2] | — |
| Height measurement | Automatic height measurements[2] | — |
| Dimensional measurements | X-/Y-measurements[2] | — |
| Additional data | Area and volume data[2] | — |
| Configuration | — | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Make | — | KLA[3] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Compatible System | — | KLA AIT-XP[3] |
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