Waferpedia

Comparison ledger

SE-600versusSEC-600

CHA SE-600, CHA SEC-600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCHACHA
CategoryDepositionDeposition
Wafer size6 in.6 in.
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCHA SE-600CHA SEC-600
Specifications
Equipment typeSputtering System[1]—
Wafer size6 in.[1]6 in.[1]
System type—Sputtering System[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org