Waferpedia

Comparison ledger

1000 Hot PlateversusKokusai DJ 825 V 8 BL

CEE 1000 Hot Plate, Hitachi Kokusai DJ 825 V 8 BL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1996 Vintage
Control system——
Generation——
FamilyCEE 1000 Hot PlateHitachi Kokusai
Specifications
Configuration4"[1]Furnace Frame[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Manufacturer—Hitachi Kokusai[3]
Model—DJ 825 V 8 BL[3]
Category—Thermal / Diffusion[2]
Wafer size—8 inch[3]
Vacuum / pumping—Low Pressure Vertical Loadlock Chamber[2]
Batch size—Batch of 100wfr (oven size)[2]
Process material—Doped Poly SI[2]
Working status—not working[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing