Comparison ledger
Cascade Microtech 11000, Cascade Microtech Summit 12000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11000Cascade Microtech | Summit 12000Cascade Microtech |
|---|---|---|
| OEM | Cascade Microtech | Cascade Microtech |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 11000 | Cascade Microtech Summit 12000 |
| Specifications | ||
| Configuration | With antivibration table[1] | HP Rack[3] |
| Temperature range | — | –65 °C to +200 °C[4] |
| Bridge travel | — | 8″ × 5″[4] |
| Wafer size | — | 8 inch[5] |
| Manipulator capacity | — | up to 8 manipulators[4] |
| X-Y stage resolution | — | 0.1 micron[5] |
| X-Y stage accuracy | — | +/- 2 micron[5] |
| Chuck type | — | 200 mm thermal chuck with Temptronic temperature controller[5] |
| Microchamber | — | Attoguard Microchamber[5] |
| Microscope | — | Azoom microscope with single long working distance objective[5] |
| Vibration isolation | — | Vibration isolation table[5] |
| Temperature | — | With Attoguard Microchamber & -65°C to 200°C Shielded Chuck[5] |
| Support for manipulators | — | up to 8[5] |
| Thermal chuck | — | 200 mm, range -65°C to +200°C, with Temptronic temperature controller[5] |
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