Comparison ledger
Canon FPA 5500 iZa i-Line, Nikon SF 130, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 5500 iZa i-LineCanon | SF 130Nikon |
|---|---|---|
| OEM | Canon | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 5500 | Nikon SF 130 |
| Specifications | ||
| Configuration | Wide-Field[1] | With:[3] |
| Machine type | Stepper[1] | — |
| Exposure source | i-line[2] | — |
| Wafer size | 8 inch[1] | — |
| Field configuration | Wide-field[2] | — |
| Manufacturer | Canon[1] | Nikon[3] |
| Operating System | — | Windows[3] |
| Model | — | SF 130[3] |
| Category | — | Lithography[4] |
| Light Source | — | i-line mercury lamp (365 nm wavelength)[5] |
| Exposure Wavelength | — | 365 nm[6] |
| Max Wafer Size | — | 200 mm[6] |
| Numerical Aperture | — | ~0.50[6] |
| Throughput | — | about 100 wafers per hour[6] |
| Common Process Node | — | ≥ 0.25 μm[6] |
| Tool type | — | lithography stepper[4] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →