Comparison ledger
Brooks 017-0146-01 Prealigner, Quintel Q 4000 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | Q 4000 MaskQuintel |
|---|---|---|
| OEM | Brooks | Quintel |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Quintel Q 4000 Mask |
| Specifications | ||
| Configuration | — | Quintel Power Supply 365-405nm source; bottom shelve right side.[1] |
| Equipment type | — | Mask aligner[1] |
| Power supply source | — | 365-405nm source[1] |
| Mask holder | — | Fixed[1] |
| Split field objectives | — | With zoom capabilities[1] |
| Head lift exposure source | — | With zoom objectives[1] |
| Illumination control panel and vacuum/separation pressure gauge | — | Left side[1] |
| Joy stick 1 | — | Mask viewing manipulator; left side[1] |
| Joy stick 2 | — | Substrate manipulator; right side[1] |
| Theta substrate adjustor | — | Left side[1] |
| Objective focus switch / coarse align / contact separation button | — | Right side[1] |
| Parameter control display panel | — | Right side[1] |
| Power on switch | — | Right side[1] |
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