Waferpedia

Comparison ledger

017-0146-01 PrealignerversusNES 1 H 04 Mini

Brooks 017-0146-01 Prealigner, Nikon NES 1 H 04 Mini, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NES 1 H 04 Mini

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →