Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 3000 i 4 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 3000 i 4 i-LineCanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 3000 |
| Specifications | ||
| Reticle size | — | 6"[1] |
| Wafer type | — | Notch[1] |
| Auto feed | — | Left hand[1] |
| Chuck type | — | Pin[1] |
| GBR unit | — | No[1] |
| Cassette barcode | — | No[1] |
| Reticle barcode | — | No[1] |
| Track interface/type | — | Yes, DNS[1] |
| Software version | — | V4.08B.09[1] |
| Configuration | — | Missing parts:[1] |
| Date of lens data | — | 4/3/2020[1] |
| IUC Uniformity NA/Sigma mode (54/60) | — | 9087[1] |
| IUC Distribution NA/Sigma mode (54/60) | — | 1.753[1] |
| Wafer Size | — | 8 inch[2] |
| Reticle Size | — | 6 inch[1] |
| Track Interface | — | Yes, DNS[1] |
| Missing Parts | — | PCBs from D-Rack, Main computer[1] |
| Lens Data Date | — | 4/3/2020[1] |
| Vintage | — | 1994[2] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →