Waferpedia

Comparison ledger

IGF-6680E-MPversus1000 Hot Plate

Blue M IGF-6680E-MP, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M IGF-6680E-MPCEE 1000 Hot Plate
Specifications
ModelIGF-6680E-MP[1]—
Typeelectric industrial furnace[1]Hot Plate[2]
ControllerPro-Master I microprocessor controller[1]—
Temperature monitoringtwo thermocouples, one for the controller and one for the over temperature alarm[1]—
Over temperature alarm setpoint593 C[1]—
Available gas inputN2[1]—
Chamber atmosphereinert gas atmosphere; inert or forming gas ambient by request[1]—
Chamber ventingvented to the chemical hood exhaust system[1]—
Locationcleanroom, packaging bay[1]—
Training3 sessions (2 trainings and a checkout session)[1]—
Configuration—4"[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]ncf.uic.eduncf.uic.edu
  2. [2]inventory listing