Comparison ledger
Blue M 0 V 500, YES 3TA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | 3TAYES |
|---|---|---|
| OEM | Blue M | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 4 in, 5-6 in, 8 in, 12 in |
| Process node | — | — |
| Introduced | — | 1980 |
| Production run | — | 1980– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | YES 3TA |
| Cited variants | — | |
| Specifications | ||
| Model | — | YES-3TA[2] |
| Category | — | Vacuum Bake / Vapor Prime Systems[2] |
| Capacity | — | 8 cassettes of 4-inch wafers, or 1 cassette of 5-8 inch wafers[1] |
| Cleanliness | — | less than 10x1 micron particles per 4-inch wafer[1] |
| Throughput | — | 2 full loads/hr[1] |
| HMDS usage | — | <4 ml/200 wafers (120 prime cycles/pint)[1] |
| Temperature | — | 160°C max[1] |
| Process type | — | Vacuum Bake / Vapor Prime[1] |
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