Comparison ledger
Axcelis GSD 200 E, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | GSD 200 EAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis GSD 200 E | Varian 160 XP Ion |
| Specifications | ||
| Type | Ion Implanter[1] | — |
| OEM | Axcelis[1] | Varian[4] |
| Model | GSD 200 E[1] | 160 XP Ion[4] |
| Documentation | Illustrated Parts Guide G-30-045AH14 Rev 06[2] | — |
| Product family | GSD[2] | — |
| Subtype (from component guide) | High Current (implied by section 'High Current Post Accel Extraction Electrode Assembly/Beam Guide')[2] | — |
| Configuration | — | 150mm High Current IMP[3] |
| Category | — | Ion Implantation[3] |
| Tool type | — | ion implanter[3] |
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