Comparison ledger
Axcelis 200 ACU, SPTS MACS ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | MACS ICPSPTS |
|---|---|---|
| OEM | Axcelis | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SPTS MACS ICP |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Parts Machine[2] | HR chamber[6] |
| Manufacturer | Axcelis[2] | SPTS / STS[6] |
| Model | 200 ACU[2] | MACS ICP[6] |
| Tool type | Asher[2] | — |
| Wafer size | 200mm[4] | 8 inch[6] |
| Serial number | AU6A356AH[4] | — |
| Computer system | M 200 PC, M 200[5] | — |
| Part number | SC 4572 A[5] | — |
| Volts | 208[5] | — |
| Amps | 30[5] | — |
| Equipment type | Asher[2] | — |
| Wafer configuration | 8 inch[3] | — |
| Clamp type | — | standard WTC[6] |
| Coil RF power | — | Advanced Energy RFG3001, 3kw[6] |
| Platen RF power | — | ENI ACG-3B 13.56MHZ, 300w[6] |
| Load lock pump | — | Ebara AAL10[6] |
| Chamber pump | — | Ebara A30W[6] |
| Turbo pump | — | Leybold MAG2000CT[6] |
| Turbo Pump Controller | — | Leybold MAG Drive 2000[6] |
| Chiller | — | ATS/DEX-20ADI[6] |
| Category | — | Etch[7] |
| Chamber | — | HR chamber[6] |
| Wafer capability | — | 6", 8" capable[6] |
| Wafer handling | — | MACS loader for cassette to cassette operation (2 load stations)[6] |
| Vacuum load lock | — | Carousel vacuum load lock[6] |
| Backside cooling | — | Helium backside cooling (HBC)[6] |
| Gases | — | C4F8 (200 sccm); SF6 (1000 sccm); O2 (200 sccm); Ar (50 sccm)[6] |
| Vintage | — | 2002[6] |
| Voltage | — | 208 Volts / 60 Hz, 40 Amps/phase[1] |
| Chamber quantity | — | 1 chamber[8] |
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