Comparison ledger
Axcelis 200 ACU, Lam Research TCP 9400 SE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | TCP 9400 SELam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research TCP 9400 SE |
| Cited variants | — | |
| Specifications | ||
| Configuration | Parts Machine[3] | — |
| Manufacturer | Axcelis[3] | — |
| Model | 200 ACU[3] | — |
| Tool type | Asher[3] | — |
| Wafer size | 200mm[5] | 200 mm (8 inch)[7] |
| Serial number | AU6A356AH[5] | — |
| Computer system | M 200 PC, M 200[6] | — |
| Part number | SC 4572 A[6] | — |
| Volts | 208[6] | — |
| Amps | 30[6] | — |
| Equipment type | Asher[3] | — |
| Wafer configuration | 8 inch[4] | — |
| Software Revision | — | E1.6.1-002[7] |
| Main UI PN | — | PC NEXT 33[7] |
| ESC | — | 718-094523-281[7] |
| Liner | — | 715-030329-002[7] |
| GAZ Box Réf | — | 853-024403-104[7] |
| Platform | — | Rainbow[8] |
| Source type | — | Inductively coupled (TCP)[8] |
| Chamber configuration | — | Single chamber[8] |
| Wafer transport | — | Cassette to cassette[8] |
| Vacuum pump | — | Leybold TURBOVAC 1000C[1] |
| Software version | — | Envision version 1.4[1] |
| End point detection | — | Emission and interferometric[8] |
| Ceramic free chamber | — | Yes[1] |
| Waferless auto clean (WAC) | — | Yes[1] |
| CE Certified | — | Yes[1] |
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